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Smart Sensors and Actuators



#40225 / #5

Seit WS 2019/20

Fakultät IV

E 3

Institut für Energie und Automatisierungstechnik

34311700 FG Sensorik und Aktuatorik

Thewes, Roland

Boldt, Niklas Philip

POS-Nummer PORD-Nummer Modultitel
2345932 36360 Smart Sensors and Actuators

Learning Outcomes

After a successful participation of this course students hold advanced knowledge in the field of CMOS-integrated metrological determination of temperature, light/color and motion. In this domain they are able to identify problem formulations and systematically develop solution concepts. In addition they are qualified to analyze and critically evaluate scientific approaches.


Methodical and application oriented knowledge to determine the most important physical parameters (temperature, light/color, motion) will be advanced and linked to the field of CMOS-integration. Equipped with this knowledge, students are able to solve state of the art problems from industry and science based on typical parameters and calculations. In the module (IV) "Smart Sensors and Actuators" silicon- and CMOS-based sensors and actuators are considered. This includes basics of solid state physics, operating principles, embodiment and characteristics, as well as suitable design approaches for integrated circuits for readout and operation of such sensors and actuators. Covered topics are: integrated temperature sensors, PTAT- (proportional to absolute temperature-) circuits, accurency-limiting artifacts and their compensation, electrothermal filters, photodiodes and photodiode arrays for CMOS cameras, CCDs, active pixels and their operating principles, CMOS imaging, accelerometers and gyroscopes, MEMS technology, digital mirror arrays, and DLP technology for projectors. Lecture language is English.

Module Components


All Courses are mandatory.

Course Name Type Number Cycle Language SWS VZ
Smart Sensors and Actuators I+II IV 0430 L 412 WS No information 4

Workload and Credit Points

Smart Sensors and Actuators I+II (IV):

Workload description Multiplier Hours Total
Präsenzzeit 15.0 4.0h 60.0h
Vor-/Nachbereitung 15.0 4.0h 60.0h
Vorbereitungszeit für Prüfung 15.0 4.0h 60.0h
180.0h(~6 LP)
The Workload of the module sums up to 180.0 Hours. Therefore the module contains 6 Credits.

Description of Teaching and Learning Methods

Die Vorlesung wird begleitet durch 6 bis 7 Übungen, in denen ausgewählte Themen vertieft werden. The lecture is accompanied by 6 to 7 tutorials where selected topics are covered in depth.

Requirements for participation and examination

Desirable prerequisites for participation in the courses:

Voraussetzung für die Teilnahme sind elektrotechnische und halbleitertechnische, teilweise auch schaltungstechnische Grundlagenkenntnisse aus dem Bachelor-Studiengang Elektrotechnik. Sound acquirement of basics of electrical and semiconductor engineering on a Bachelor-level are required, knowledge of circuit design is advantageous.

Mandatory requirements for the module test application:

No information

Module completion



Type of exam

Oral exam




40-45 min

Duration of the Module

The following number of semesters is estimated for taking and completing the module:
1 Semester.

This module may be commenced in the following semesters:

Maximum Number of Participants

The maximum capacity of students is 30.

Registration Procedures

Die Anmeldung zur Modulprüfung erfolgt über QISPOS. Aktuelle Informationen zur Veranstaltung und zur Anmeldung: Für Informationen zur Veranstaltung bitte auch im entsprechenden ISIS-Kurs einschreiben! Enrollment for the examination takes place through QISPOS. For recent information to the lecture and the enrollment please visit also For information to the lecture please also subscribe to the corresponding ISIS-course!

Recommended reading, Lecture notes

Lecture notes

Availability:  available
Additional information:
Printed scripts are available in the 1st lecture. No digital copies are provided!

Electronical lecture notes

Availability:  unavailable


Recommended literature
No recommended literature given.

Assigned Degree Programs

This module is used in the following Degree Programs (new System):

Verwendungen (1)
Studiengänge: 1 Stupos: 1 Erstes Semester: SoSe 2020 Letztes Semester: SoSe 2022

This moduleversion is used in the following modulelists:


No information