Moses - Technology for Thin Film Devices

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Diese Modulbeschreibung gilt nicht im aktuellen Semester.

Die Modulbeschreibung gilt nur für den Zeitraum WS 2015/16 - SoSe 2023. Die Version für das aktuelle Semester (SoSe 2024) finden Sie hier: Modulbeschreibung des SoSe 2024

Module / Version:
#40184 / #1

Validity:
WS 2015/16 - SoSe 2023

Default display language:
English

Module title:
Technology for Thin Film Devices

Credits:
6

Responsible person:
Szyszka, Bernd

Grading:
benotet

Type of exam:
Mündliche Prüfung

Zugehörigkeit

Faculty:
Fakultät IV

Institute:
Institut für Hochfrequenz und Halbleiter-Systemtechnologien

Area of expertise:
34325800 FG S-Professur Technologie für Dünnschicht-Bauelemente

Prüfungsausschuss:
No information

Kontakt

Office:
HFT 5-2

Contact person:
Szyszka, Bernd

E-mail address:
bernd.szyszka@tu-berlin.de

Website:

http://www.tfd.tu-berlin.de/

Learning Outcomes

The students know the basic properties of the manufacturing of thin film devices and will be able to evaluate them. Futhermore, they know the fundamentals of coating processes, layer stacks and characterizatuin methods as well as applications of thin film devices.

Content

The course covers technological and application oriented aspects of thin film devices. Content of the course are atmospheric pressure and vacuum coating processes, plasma technologies, properties of thin films (electrical, optical and mechanical properties) and their dependance on the film structure, characterization methods and applications of thin film devices.

Module Components

Wahlpflicht:

1 from the following courses must be completed.

Course Name	Type	Number	Cycle	Language	SWS
Fundamentals of Vacuum and Plasma Process Technologies	VL		SoSe	English	2
Industrial Plasma Technologies	VL		SoSe	English	2
Dünne Schichten	SEM	3236 L 328	WiSe/SoSe	No information	2

Pflichtgruppe:

All Courses are mandatory.

Course Name	Type	Number	Cycle	Language	SWS	VZ
Technology of Thin Film Devices	VL	0431 L 007	WiSe/SoSe	No information	2

Workload and Credit Points

Technology of Thin Film Devices (VL):

Workload description	Multiplier	Hours	Total
Präsenszeit	15.0	2.0h	30.0h
Vor-/Nachbereitung	15.0	4.0h	60.0h
			90.0h(~3 LP)

Fundamentals of Vacuum and Plasma Process Technologies (VL):

Workload description	Multiplier	Hours	Total
Präsenzzeit	15.0	2.0h	30.0h
Vor-/Nachbereitung	15.0	4.0h	60.0h
			90.0h(~3 LP)

Industrial Plasma Technologies (VL):

Workload description	Multiplier	Hours	Total
Präsenzzeit	15.0	2.0h	30.0h
Vor-/Nachbereitung	15.0	4.0h	60.0h
			90.0h(~3 LP)

Dünne Schichten (SEM):

Workload description	Multiplier	Hours	Total
Präsenzzeit	15.0	2.0h	30.0h
Vor-/Nachbereitung	15.0	4.0h	60.0h
			90.0h(~3 LP)

The Workload of the module sums up to 180.0 Hours. Therefore the module contains 6 Credits.

Description of Teaching and Learning Methods

Das Wissen wird anhand von Vorlesungen und Seminaren vermittelt. Die Vorlesungsteilnehmer_innen organisieren sich in Gruppen, die semesterbegleitend selbständig vorgegebene Themen bearbeiten.

Requirements for participation and examination

Desirable prerequisites for participation in the courses:

Es werden Kenntnisse in den Grundlagen der Physik und Elektrotechnik erwartet. Grundlagen in der Chemie sind wünschenswert.

Mandatory requirements for the module test application:

This module has no requirements.

Module completion

Grading

graded

Type of exam

Oral exam

Language

English

Duration/Extent

No information

Duration of the Module

The following number of semesters is estimated for taking and completing the module:
1 Semester.

This module may be commenced in the following semesters:
Winter- und Sommersemester.

Maximum Number of Participants

This module is not limited to a number of students.

Registration Procedures

Nähere Informationen erhalten Sie unter http://www.tfd.tu-berlin.de und im ISIS-Kurs.

Recommended literature
Milton Ohring, Materials Science of Thin Films, 978-0-12-524975-1

Assigned Degree Programs

Semester:

Zeige auch ausgelaufene Studiengänge und StuPOs

This module is used in the following Degree Programs (new System):

	Studiengang / StuPO	StuPOs	Verwendungen	Erste Verwendung	Letzte Verwendung
This module is not used in any degree program.

Students of other degrees can participate in this module without capacity testing.

Miscellaneous